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Cited article:

Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applications

Reza Jalil Mozhdehi, Ali Selk Ghafari, Amir A.A. Khayyat

Mechanics & Industry, 16 3 (2015) 306

Published online: 2015-04-21

DOI: https://doi.org/10.1051/meca/2015008

This article has been cited by the following article(s):

RETRACTED: A Closed-Loop Control Mathematical Model for Photovoltaic-Electrostatic Hybrid Actuator with a Slant Lower Electrode Based on PLZT Ceramic

Zhen Lv, Muhammad Uzair, Xinjie Wang and Yafeng Liu
Actuators 10 (11) 285 (2021)
https://doi.org/10.3390/act10110285