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Cited article:

Fabrication, caractérisation et modélisation de micropoutres multimorphes intégrant un film piézoélectrique d'AlN comme actionneur

Alexandru Andrei, Katarzyna Krupa, Michal Jozwik, Patrick Delobelle, Laurent Hirsinger, Christophe Gorecki, Lukasz Nieradko, Cathy Meunier

Mécanique & Industries, 8 3 (2007) 267-278

Published online: 2007-08-17

DOI: https://doi.org/10.1051/meca:2007048

This article has been cited by the following article(s):

Interferometric study of reliability of microcantilevers driven by AlN sandwiched between two metal layers

K. Krupa, C. Gorecki, R. Jóźwicki, M. Józwik and A. Andrei
Sensors and Actuators A: Physical 171 (2) 306 (2011)
https://doi.org/10.1016/j.sna.2011.07.017