Mechanics & Industry

Symmetry and asymmetry from MEMS variable capacitor by nonlinear micro stoppers

Jianxiong Zhu, Yunde Shi and Feng Ma

Mechanics & Industry, 22 (2021) 41

Published online: 20 September 2021

DOI: 10.1051/meca/2021039

Jianxiong Zhu

Yunde Shi

Feng Ma

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