Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applicationsReza Jalil Mozhdehi, Ali Selk Ghafari and Amir A.A. KhayyatMechanics & Industry, 16 3 (2015) 306DOI: https://doi.org/10.1051/meca/2015008
