Mechanics & Industry

Optimal PID control of a nano-Newton CMOS-MEMS capacitive force sensor for biomedical applications

Reza Jalil Mozhdehi and Ali Selk Ghafari

Mechanics & Industry, 15 2 (2014) 139-145

Published online: 22 April 2014

DOI: 10.1051/meca/2014019

Reza Jalil Mozhdehi

Ali Selk Ghafari

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