Mechanics & Industry

Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applications

Reza Jalil Mozhdehi, Ali Selk Ghafari and Amir A.A. Khayyat

Mechanics & Industry, 16 3 (2015) 306

Published online: 21 April 2015

DOI: 10.1051/meca/2015008

Reza Jalil Mozhdehi

Ali Selk Ghafari

Amir A.A. Khayyat

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