Open Access

Table 1

Physical characteristics of microcantilever piezoelectric [23].

  Physical properties of the microcantilever

  E (GPa) L (μm) b (μm) ω (μm) ρ (kg m−3) t (μm) ν β22 (Mm F−1) h12 (MV m−1)
Microcantilever 105 500 250 55 2330 4 0.28
Piezoelectric 104 375 130 6390 4 0.25 45.5 500

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