Table 2

Identified parameters of the metallized membrane using the subspace method.

Theoretical resonance frequency Experimental resonance frequency Damping factor Stiffness coefficient Damping coefficient Quality factor Half-power bandwidth
2.43 MHz 2.12 MHz 1.06% 10 754 N m−1 17.1 × 10−6 N s m−1 47 45 kHz

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