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Cited article:

Experimental investigation and molecular dynamics simulations of impact-mode wear mechanisms in silicon micromachines with alkylsilane self-assembled monolayer films

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Journal of Applied Physics 118 (16) (2015)
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A kinetic theory description of liquid menisci at the microscale

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Kinetic and Related Models 8 (2) 235 (2015)
https://doi.org/10.3934/krm.2015.8.235

Experimental evaluation and numerical modeling of adhesion phenomena in polysilicon MEMS

Raffaele Ardito, Leonardo Baldasarre, Alberto Corigliano, et al.
Meccanica 48 (8) 1835 (2013)
https://doi.org/10.1007/s11012-013-9767-y

Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes

Emanuele Bertarelli, Alberto Corigliano, Andreas Greiner and Jan G. Korvink
Microsystem Technologies 17 (1) 165 (2011)
https://doi.org/10.1007/s00542-010-1185-7

A PLATE MODEL FOR THE EVALUATION OF PULL-IN INSTABILITY OCCURRENCE IN ELECTROSTATIC MICROPUMP DIAPHRAGMS

EMANUELE BERTARELLI, RAFFAELE ARDITO, RAFFAELE ARDITO, ALBERTO CORIGLIANO and ROBERTO CONTRO
International Journal of Applied Mechanics 03 (01) 1 (2011)
https://doi.org/10.1142/S1758825111000841