Open Access
| Issue |
Mécanique & Industries
Volume 11, Number 3-4, Mai-Août 2010
Giens 2009
|
|
|---|---|---|
| Page(s) | 177 - 182 | |
| DOI | https://doi.org/10.1051/meca/2010028 | |
| Published online | 15 November 2010 | |
- Y.-P. Zhao, L.S. Wang, T.X. Yu, Mechanics of adhesion in MEMS – a review, J. Adh. Sci. Technol. 17 (2003) 519–546 [CrossRef] [Google Scholar]
- M.P. de Boer, T.A. Michalske, Accurate method for determining adhesion of cantilever beams, J. Appl. Phys. 86 (1999) 817–827 [CrossRef] [Google Scholar]
- T. Yu, R. Ranganathan, N. Johnson et al., In situ characterization of induced stiction in a MEMS, J. Microelectromech. Syst. 16 (2006) 355–364 [CrossRef] [Google Scholar]
- J. Israelachvili, Intermolecular and Surface Forces, Academic Press, London, 1991 [Google Scholar]
- A. Hariri, J.W. Zu, R. Ben Mrad, Modeling of wet stiction in microelectro-mechanical systems (MEMS), J. Microelectromech. Syst. 16 (2007) 1276–1285 [CrossRef] [Google Scholar]
- W.M. van Spengen, R. Puers, I. De Wolf, A physical model to predict stiction in MEMS, J. Micromech. Microeng. 12 (2002) 702–713 [CrossRef] [Google Scholar]
- B. Bhushan, Methodology for roughness measurements and contact analysis for optimization of interface roughness, IEEE Trans. Magn. 32 (1996) 1819–1825 [CrossRef] [Google Scholar]
- F. Delrio, M.P. De Boer, J.A. Knapp, E.D. Reedy, P.J. Clews, M.L. Dunn, The role of Van der Waals forces in adhesion of micromachined surfaces, Nat. Mater. 4 (2005) 629–632 [CrossRef] [PubMed] [Google Scholar]
- P. Attard, Interaction and deformation of elastic bodies: origin of adhesion hysteresis, J. Phys. Chem. B 104 (2000) 10635–10641 [CrossRef] [Google Scholar]
- D. Tabor, The Hardness and Strength of Metals, Oxford Clarendon Press, Oxford, 1951 [Google Scholar]
- Y.Z. Hu, K. Tonder, Simulation of 3D random surfaces by 2D digital filters and Fourier analysis, Int. J. Mach. Tools Manufact. 32 (1992) 83–90 [Google Scholar]
- R. Maboudian, R. Howe, Critical review: adhesion in surface micromechanical structures, J. Vac. Sci. Technol. B 15 (1997) 1–20 [CrossRef] [Google Scholar]
- W.R. Ashurst, M.P. de Boer, C. Carraro, R. Maboudian, An investigation of sidewall adhesion in MEMS, Appl. Surf. Sci. 212-213 (2003) 735–741 [CrossRef] [Google Scholar]
- C.H. Mastrangelo, C.H. Hsu, Mechanical stability and adhesion of microstructures under capillary forces – Part I: Basic Theory, J. Microelectromech. Syst. 2 (1993) 33–43 [Google Scholar]
- C.H. Mastrangelo, C.H. Hsu, Mechanical stability and adhesion of microstructures under capillary forces – Part II: Experiments, J. Microelectromech. Syst. 2 (1993) 44–55 [CrossRef] [Google Scholar]
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.