| Issue |
Mechanics & Industry
Volume 17, Number 7, 2016
STANKIN: Advanced scientific studies and research in Mechanical Engineering
|
|
|---|---|---|
| Article Number | 719 | |
| Number of page(s) | 6 | |
| DOI | https://doi.org/10.1051/meca/2017008 | |
| Published online | 30 December 2016 | |
A new method for synthesis of hard dielectric coatings
Moscow State University of Technology “STANKIN”, 1 Vadkovsky per., Moscow GSP-4, 127994, Russian Federation
a Corresponding author: a.metel@stankin.ru
Received: 9 January 2017
Accepted: 24 January 2017
Aluminum oxide coatings have been synthesized on HSS, aluminum oxide and glass substrates using a magnetron sputtering system, which generates pulsed beams of high-energy gas atoms. The system comprises a flat grid positioned between the magnetron target and the substrates. Negative high-voltage pulses applied to the grid accelerate ions from the magnetron discharge plasma. Due to charge exchange collisions with gas molecules the ions turn into high-energy neutral atoms bombarding the coating growing on the substrate. They mix the substrate and coating atoms, thus enlarging the interface width, improving the coating adhesion and other properties.
Key words: Magnetron / sputtering / plasma / ions / charge exchange / fast atoms / pulsed beams / mixing / interface / adhesion / structure / modification
© AFM, EDP Sciences 2017
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