Mechanics & Industry
Volume 16, Number 7, 2015STANKIN 85: advanced machining methods and techniques
|Number of page(s)||6|
|Published online||30 November 2015|
Deposition of wear-resistant coatings using a combined source of metal atoms and fast gas molecules
Moscow State University of Technology “STANKIN”,
1 Vadkovsky per., 127994
a Corresponding author:
Accepted: 19 October 2015
A source of metal atoms accompanied by fast gas atoms has been developed and studied. The fast particles are produced due to charge exchange collisions of ions accelerated by potential difference between a plasma emitter inside the source and an emissive grid. The metal atoms are produced due to sputtering a target placed at the hollow cathode bottom by ions with energy up to 3 keV from the plasma emitter. Sputtered atoms cross the emitter and the grid, together with accelerated ions enter the chamber and deposit on the products. Two different discharge modes can be used to produce the plasma emitter and bombard the growing nitride coating interruptedly by atoms and molecules with energy variable from 10 to 300 eV.
Key words: Strengthening / wear-resistance / hard coatings / gas discharge / plasma / fast molecules
© AFM, EDP Sciences 2015
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