Open Access
Table 1
Material properties of the cantilever beam.
| Material name | Spring steel | PZT |
|---|---|---|
| Elastic modulus Y | 210 GPa | 66.667 GPa |
| Poisson's ratio v | 0.3 | 0.34 |
| Density ρ | 7900 kg/m3 | 7800 kg/m3 |
| Piezoelectric constant d 31 = d 32 | −2.1×10−10 C/N | |
| Dielectric constant ε 33 | 2.125 × 10−8 F/m |
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