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Table 2

Physical parameters of the materials.

Physical parameters Glass SiC Al2O3 ZrO2 Graphite coating
Relative dielectric constant ε 6.8 12.226 7.3 3.2 15
Loss tangent tan δ 0.01 0.08 0.0003 0.0005 0.2
Thermal expansion coefficientα (10−6/°C) 9 4 7.5 10.1
Modulus of elasticity E ′ (GPa) 68.9 360 370 200
Poisson's ratio v 0.23 0.142 0.22 0.25
Thermal conductivity a (W/m · °C) 3 40 25 7
Specific surface energy γ (N/m) 8 33.3 45 155
Density ρ (g/cm3) 2.5 3.8 3.9 6.8
Specific heat c (J/Kg · °C) 835 450 880 450

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