Sensitivity analysis results.
|Type of defect||tr5% (s)||Gain||Time needed for a precision of 1 µm (s)|
|no||0.0143||Kp = 122500
Kd = 700
|12% on inertia||0.0154||Kp = 105625
Kd = 650
|10% on stiffness||0.0286||Kp = 30625
Kd = 350
|10% on damping||0.0358||Kp = 19600
Kd = 280
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