Open Access
Table 1
Simulation parameters.
| System parameters | Symbols | Values | Unit |
|---|---|---|---|
| Initial gap | d0 | 10 | μm |
| Device resonant frequency | f0 | 500 | Hz |
| Pull-down voltage | Vpd | 12.4 | V |
| Movable plate thickness | h1 | 30 | μm |
| Movable plate area | A | 25 | mm2 |
| Constant permittivity | ε | 8.85 | pF/m |
| Damping ratio |
|
0.2 | 1 |
| Total spring stiffness | k | 168.88 | N/m |
| Stopper spring stiffness | k1 | 1.69 × 105 | N/m |
| Displacement limit | c | 0.2 | 1 |
| Height of top stopper | s | 0.6 | 1 |
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.