Open Access
Issue |
Mechanics & Industry
Volume 16, Number 7, 2015
STANKIN 85: advanced machining methods and techniques
|
|
---|---|---|
Article Number | 705 | |
Number of page(s) | 6 | |
DOI | https://doi.org/10.1051/meca/2015092 | |
Published online | 30 November 2015 |
- A. Anders, Handbook of Plasma Immersion Ion Implantation and Deposition, John Wiley & Sons, New York, 2000 [Google Scholar]
- A. Metel, Plasma immersion ion implantation based on glow discharge with electrostatic confinement of electrons, Surf. Coat. Technol. 156 (2002) 38–43 [Google Scholar]
- S. Grigoriev, A. Metel, Plasma- and beam-assisted deposition methods, in: Nanostructured thin films and nanodispersion strengthened coatings. Kluwer Academic Publishers, Boston, Dordrecht, London, 2004, pp. 147–154 [Google Scholar]
- N.V. Gavrilov, G.A. Mesyats, G.V. Radkovskii, V.V. Bersenev, Development of technological sources of gas ions on the basis of hollow-cathode glow discharges, Surf. Coat. Technol. 96 (1997) 81–88 [CrossRef] [Google Scholar]
- H.R. Kaufman, Broad-beam ion sources, Rev. Sci. Instrum. 61 (1990) 230–235 [CrossRef] [Google Scholar]
- A.V. Hayes, V. Kanarov, B. Vidinsky, Fifty centimeter ion beam source, Rev. Sci. Instrum. 67 (1996) 1638–1641 [CrossRef] [Google Scholar]
- A.S. Metel, Beams of fast neutral atoms and molecules in low-pressure gas-discharge plasma, Plasma Phys. Rep. 38 (2012) 254–262 [CrossRef] [Google Scholar]
- E.W. McDaniel, Collision phenomena in ionized gases, John Wiley & Sons, New York – London – Sydney, 1964 [Google Scholar]
- A. Ranjan, V.M. Donnelly, D.J. Economou, Energy distribution and flux of fast neutrals and residual ions extracted from a neutral beam source, J. Vacuum Sci. Technol. A 24 (2006) 1839–1646 [CrossRef] [Google Scholar]
- A.S. Metel, Yu.A. Melnik, V.V. Panin, Non-self-sustained glow discharge with electrostatic confinement of electrons sustained by a fast neutral molecule beam, Plasma Phys. Rep. 37 (2011) 357–365 [CrossRef] [Google Scholar]
- Zh. Wang, S.A. Cohen, Hollow cathode magnetron, J. Vacuum Sci. Technol. A 17 (1999) 77–82 [CrossRef] [Google Scholar]
- S.N. Grigoriev, Yu.A. Melnik, A.S. Metel, V.V. Panin, V.V. Prudnikov, A compact vapor source of conductive target material sputtered by 3-keV ions at 0.05-Pa pressure, Instrum. Exp. Techn. 52 (2009) 731–737 [Google Scholar]
- V.I. Kolobov, A.S. Metel, Glow discharges with electrostatic confinement of fast electrons, J. Phys. D 48 (2015) 233001 [Google Scholar]
- A. Metel, S. Grigoriev, Yu. Melnik, V. Panin, V. Prudnikov, Cutting tools nitriding in plasma produced by a fast neutral molecule beam, Jpn J. Appl. Phys. 50 (2011) 08JG04 [CrossRef] [Google Scholar]
Current usage metrics show cumulative count of Article Views (full-text article views including HTML views, PDF and ePub downloads, according to the available data) and Abstracts Views on Vision4Press platform.
Data correspond to usage on the plateform after 2015. The current usage metrics is available 48-96 hours after online publication and is updated daily on week days.
Initial download of the metrics may take a while.