Mechanics & Industry
Volume 18, Number 7, 2017
STANKIN: Innovative manufacturing methods, measurements and materials
|Number of page(s)||5|
|Published online||30 December 2017|
Nanoscale surface characterization using laser interference microscopy
Joint stock company “Urals optical and mechanical plant”,
Vostochnaya str. 33b,
2 Moscow State University of Technology “STANKIN”, Vadkovsky per. 1, Moscow 127994, Russia
* e-mail: firstname.lastname@example.org
Accepted: 11 December 2017
Nanoscale surface characterization is one of the most significant parts of modern materials development and application. The modern microscopes are expensive and complicated tools, and its use for industrial tasks is limited due to laborious sample preparation, measurement procedures, and low operation speed. The laser modulation interference microscopy method (MIM) for real-time quantitative and qualitative analysis of glass, metals, ceramics, and various coatings has a spatial resolution of 0.1 nm for vertical and up to 100 nm for lateral. It is proposed as an alternative to traditional scanning electron microscopy (SEM) and atomic force microscopy (AFM) methods. It is demonstrated that in the cases of roughness metrology for super smooth (Ra >1 nm) surfaces the application of a laser interference microscopy techniques is more optimal than conventional SEM and AFM. The comparison of semiconductor test structure for lateral dimensions measurements obtained with SEM and AFM and white light interferometer also demonstrates the advantages of MIM technique.
Key words: Laser interference microscopy / quantitative phase imaging / super-resolution / nanometrology / microelectronics
© AFM, EDP Sciences 2017
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