Table 3
Parameters of stages of the technological process of deposition of coatings.
| Process | PN (Pa) | U (V) | ICr (A) | IAl (A) | ITi (A) | IZr–Nb, (A) |
|---|---|---|---|---|---|---|
| The preparatory stage (pumping out, heating) | 0.06 | +20 | 80 | 120 | 65 | 75 |
| Heating and cleaning using gas plasma. | 2.0 | 100 DC/900 AC f = 10 kHz, 2:1 | – | 80 | – | – |
| Deposition of coating | 0.36 | −800 DC | 70 | 160 | 55 | 70 |
| Cooling of products | 0.06 | – | – | – | – | – |
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