Fig. 1
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Schematic diagram of the experimental setup (1) vacuum chamber; (2, 5, 9) feedthrough; (3) plasma; (4) flat anode; (6) steel rod; (7) hollow anode; (8) grounded cylinder; (10) substrate holder; (11) connecting pipe; (12) grounded grid; (13,16) DC power supplies; (14, 15) switches; (17) voltmeter; (18) cathode sheath; (19) ions; (20) electrons; (21) liquid titanium.
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