A new method for production of titanium vapor and synthesis of titanium nitride coatings

STANKIN: Innovative manufacturing methods, measurements and materials

Open Access

Fig. 2

Dependence of the discharge voltage U (full curves) and the cathode potential fall U_c (dotted curves) on argon pressure p at the current I = 0.5 A and anode surface area S_a = 0.064 (1), 0.032 (2), 0.016 (3), 0.008 (4), 0.004 (5) and 0.002 m² (6). At p < p_o the voltage rises and at p = p^ex the discharge extinguishes.

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